光罩製作 (Mask Manufacturing)

光罩製作 (Mask Manufacturing)
經由雷射/電子束描繪機將線路圖描繪在石英/玻璃基板上,此基板(光罩),會藉曝光機投影成像技術,將其線路圖成像到晶圓或玻璃基板上。

Product

Mycronic AB (瑞典)

  • Leading supplier of production solutions to the electronics industry
  • Pattern Generators: Display, Semiconductor, Touch Panels and Advanced Packaging
  • Surface Mount Technology Equipment: Placement, Jet Printing and Component Storage

Mycronic AB (瑞典)

  • Leading supplier of production solutions to the electronics industry
  • Pattern Generators: Display, Semiconductor, Touch Panels and Advanced Packaging
  • Surface Mount Technology Equipment: Placement, Jet Printing and Component Storage

光罩修補(Photo Mask Repair)
雷射氣相沉積(Laser CVD):
利用特殊雷射CVD成膜之技術,使用雷射將羰基金屬化合物-Cr(CO)6高溫分解(光解作用),使Cr附著於光罩上,進而將不良線路修補連接。

Product

Cowin DST CO, LTD. (韓國)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

黃光微影塗佈及顯影 (Photo-Lithography)

光阻塗佈:去水烘烤、HMDS塗佈、光阻塗佈、軟烤。
曝光:以曝光機搭配光罩使用。
顯影:曝後烤、顯影、硬烤。

乾式蝕刻 (Dry Etch)

利用氣體作為反應物,以低壓和高能的環境產生電漿,去除玻璃基板表面的薄膜,定義出圖形。

測試修補 (Laser Repair)

將已切好的晶片放置在IC基板上,並將之黏著,要求的是黏著的速度、正確度。

黑色阻(Black Matrix)覆蓋遮光
利用特殊雷射將濾光片上之黑色色阻融化並覆蓋於漏光之畫素上, 以達到遮蔽之結果

色阻碳化(Direct Method)遮光
利用特殊雷射將濾光片上漏光畫素之R/G/B色阻碳化,以達到遮蔽之結果

雷射氣相沉積(Laser CVD)
利用特殊雷射CVD成膜之技術,使用雷射將羰基金屬化合物-W(CO)6高溫分解(光解作用),使W附著於面板上,進而將斷開之不良斜配線路修補連接

Product

Cowin DST CO, LTD. (韓國)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

Cowin DST CO, LTD. (韓國)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

Cowin DST CO, LTD. (韓國)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

噴墨式印刷 (Inkjet Printing)

噴塗R/G/B 有機發光材料,及其對應之傳導層底材在玻璃基板上,型成OLED 發光像素圖型。

導光板製作 (LGP Manufacturing)

導光板(Light Guide Plate)是背光模組零組件中的關鍵元件。利用全反射的原理將光源光線傳至導光板的遠端,再利用導光板的底面擴散點,往各個角度擴散,可提高面板光輝度及控制亮度均勻。

Product

TC TECH Sweden AB (瑞典)

A patented unique system for the production of light guide plates

  • TCP 1000 HT/HP; 150 HPE; 100 HP
  • TCP EE, Edge Embossing